High-purity fluoropolymers for semiconductor manufacturing.

Wet process systems, chemical delivery, high-purity fluid handling, and plasma equipment sealing — with the cleanliness, documentation, and supply stability fabs require.

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WET PROCESS CHEMICAL DELIVERYVALVES & FITTINGS CMP SLURRY HANDLINGPLASMA CHAMBER SEALING WAFER CARRIERSION-IMPLANT SEALS

MATERIAL FOCUS BY COMPONENT

COMPONENT

RECOMMENDED MATERIALS

WHY

Wet process chemical delivery

High-purity PFA (HP / 11N)

Ultra-low extractables, chemical resistance

Valve & fitting bodies

PFA HP · PTFE

Particulate cleanliness

CMP slurry tubing

PFA

Abrasion plus chemical resistance

Plasma chamber seals

FFKM

Plasma resistance, low particle generation

Wafer carriers

PFA

Dimensional stability, cleanliness

Ion implant seals

FFKM

Vacuum, radiation tolerance

SEE HIGH-PURITY PFA GRADES

Qualifying high-purity fluoropolymers for a fab? Let's map the supply.

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